Chemical Engineering @ Carnegie Mellon

Andrew J. Gellman Group S.O.P.

Ion Pump Cleaning

  1. Be certain that the ion pump controller is off and the high voltage cable is disconnected from the pump.
  2. Always wear latex gloves to prevent contamination of the ion pump.
  3. Maintain segregation of magnetized tools and accessories.
  4. Degauss the magnetized equipment when finished.
  5. Never use bolt grease on the screws inside the ion pump.
  6. The vacuum hose must be equiped with a clean metal tip and not plastic to prevent any contamination.
Separation of Pump from Chamber
  1. Bring the platform to the bottom of the ion pump and secure it.
  2. Place two lab jacks under the platform so they secure it.
  3. Remove the nuts from the threaded studs that support the ion pump.
  4. Lower the pump slowly using the platform and lab jacks, until it is easily removed from the chamber bench.
  5. Remove the ion pump from the chamber bench.
Removal and Repair of Electrodes
  1. Remove the connective metal strips attached to all the electrodes.
  2. Remove an electrode from the ion pump.
  3. Remove the screws that hold the electrode together, and disassemble it.
  4. Clean each piece (two cathode plates, the backing plate, the high voltage anode rings, and two side braces) thoroughly using acetone or isopropanol, and the use of a sonic bath is recommended, though not necessary. The pieces can be dried with an air hose and Kimwipes to expedite drying.
  5. Reassemble the electrode with the most unused side of the cathode plates facing inward.
  6. Clean the cavity from which the electrode was removed by vacuuming and wiping with either acetone or isopropanol.
  7. Return the electrode to the ion pump.
  8. Repeat steps 2 through 6 until all the electrodes are clean.
  9. Vacuum debris from the bottom of the ion pump.
  10. Reattach the connective metal strips to the electrodes.
  11. Clean the interior of the pump with acetone or isopropanol.
Attachment of Pump to Chamber
  1. Secure the aluminum platform on which the pump will be placed.
  2. Put the ion pump on the platform.
  3. Place a gasket on the pump flange.
  4. Place two lab jacks under the platform so they secure it.
  5. Raise the pump slowly using the platform and lab jacks until the pump is in intimate contact with the chamber, making certain the gasket is seated properly and the threaded bolts are cleared.
  6. Replace the nuts on the threaded studs that support the ion pump.
  7. Slightly lower the platform so the threaded bolts are supporting the pump.

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